Model: | Structural ceramic chuck |
Desc: | By our unique and carefully controlled synthesis process, The porous ceramic substrate or panel has uniform size and uniform distribution of through pores. It can achieve fully distributed effect when used in the field of filtration or object suction. Principal characteristics: ․The pore size could be controlled in the range from submicrometer to several tenth micrometers. ․The ventilation rate could be controlled from 30% to 80% ․Have rigid and strong mechanical properties, The breakdown stress can sustain up to 900~1000 kg/cm2. ․The flatness of the panel surface: 5 um/100 mm. ․The surface roughness of the panel: 2 um or better. |
Char: | 1. Automatic load-unload 2. High precision stacking 3. Object suction 4. Fixed position 5. Filtration 6. High precision screen printing 7. Chuck table for IC and LED wafer ,glass dicing ,etc… |
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